CLAMP ASSEMBLY

A clamp assembly is disclose, the clamp assembly comprising a clamp (50) configurable to clamp a support member (110) to a lower base surface (49) of the clamp by electrostatic adhesion, and an arrangement configurable to direct a gas to the lower base surface (49) of the clamp. The arrangement is c...

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Bibliographic Details
Main Authors VAN DER WILK, Ronald, GUAN, Tiannan
Format Patent
LanguageEnglish
French
Published 10.06.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:A clamp assembly is disclose, the clamp assembly comprising a clamp (50) configurable to clamp a support member (110) to a lower base surface (49) of the clamp by electrostatic adhesion, and an arrangement configurable to direct a gas to the lower base surface (49) of the clamp. The arrangement is configurable to humidify the gas by exposing the gas to a liquid. Also disclosed is a method of discharging a lower base surface of a clamp, The method comprises the steps of humidifying a gas by exposing the gas to a liquid, and directing the humidified gas to a lower base surface of the clamp. L'invention concerne un ensemble de serrage, l'ensemble de serrage comprenant un élément de serrage (50) apte à être configuré pour serrer un organe de support (110) sur une surface de base inférieure (49) de l'élément de serrage par adhésion électrostatique, et un agencement configurable pour orienter un gaz vers la surface de base inférieure (49) de l'élément de serrage. L'agencement est apte à être configuré pour humidifier le gaz par l'exposition du gaz à un liquide. L'invention concerne également un procédé de déchargement d'une surface de base inférieure d'un élément de serrage. Le procédé comprend les étapes consistant à humidifier un gaz par l'exposition du gaz à un liquide, et orienter le gaz humidifié vers une surface de base inférieure de l'élément de serrage.
Bibliography:Application Number: WO2020EP80652