SELECTIVE LASER TRANSFER DEVICE AND TRANSFER METHOD

• Main Authors: PARK, Ah-Young, SONG, Joonyub, KIM, Seung Man, HAN, Seong Heum, LEE, Jae-Hak
• Format: Patent
• Language: English; French; Korean
• Published: 29.04.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES USING STIMULATED EMISSION; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

A multi-beam-generation-based laser transfer device according to one embodiment of the present invention comprises: a laser oscillator which generates a laser beam; an active multi-beam optical system which divides the laser beam into multiple beams and selectively opens and closes each of individual elements of the multiple beams; a stage which transfers a transfer substrate and a target substrate in a biaxial direction; and a controller which sets the position of a transfer target point and transmits a position signal to the active multi-beam optical system and the stage so as to control the driving of the stage and the opening/closing of the multiple beams according to the position signal. Un dispositif de transfert par laser basé sur la génération de faisceaux multiples selon un mode de réalisation de la présente invention comprend : un oscillateur laser qui génère un faisceau laser ; un système optique à faisceaux multiples actif qui divise le faisceau laser en de multiples faisceaux et ouvre et ferme sélectivement chacun des éléments individuels des multiples faisceaux ; un étage qui transfère un substrat de transfert et un substrat cible dans une direction biaxiale ; et un dispositif de commande qui règle la position d'un point cible de transfert et transmet un signal de position au système optique à faisceaux multiples actif et à l'étage de façon à commander l'entraînement de l'étage et l'ouverture/la fermeture des multiples faisceaux en fonction du signal de position. 본 발명의 일 실시예에 따른 멀티빔 생성 기반 레이저 전사 장치는, 레이저 빔을 생성하는 레이저 발진기, 상기 레이저 빔을 멀티빔으로 분할하고, 상기 멀티빔의 각 개별 요소를 선택적으로 개폐하는 능동 멀티빔 광학계, 전사 기판과 타겟 기판을 2축 방향으로 이송하는 스테이지, 및 전사 대상 포인트의 위치를 설정하고 상기 위치 신호를 상기 능동 멀티빔 광학계와 상기 스테이지에 전송하여, 상기 위치 신호에 따른 상기 스테이지의 구동과 상기 멀티빔의 개폐를 제어하는 제어기를 포함한다.