TITANIUM LINER TO REDUCE METAL CONTAMINATION

Embodiments described herein relate to apparatus and techniques for reducing an occurrence of metal contamination in a processing chamber while process a substrate using a decoupled plasma formed in the processing chamber. A liner substantially prevents contact between the plasma any aluminum or alu...

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Bibliographic Details
Main Authors NAGORNY, Vladimir, GUARINI, Theresa Kramer, SWENBERG, Johanes F, LIU, Wei
Format Patent
LanguageEnglish
French
Published 19.11.2020
Subjects
BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Summary:Embodiments described herein relate to apparatus and techniques for reducing an occurrence of metal contamination in a processing chamber while process a substrate using a decoupled plasma formed in the processing chamber. A liner substantially prevents contact between the plasma any aluminum or aluminum oxide (e.g., anodized aluminum) in the processing chamber. In one embodiment, the liner is a unitary apparatus positioned in the processing chamber. In one embodiment, the liner is deposited on interior walls of the chamber body via a Des modes de réalisation de l'invention concernent un appareil et des techniques permettant de réduire l'apparition d'une contamination métallique dans une chambre de traitement tout en traitant un substrat à l'aide d'un plasma découplé formé dans la chambre de traitement. Un revêtement empêche sensiblement le contact entre le plasma et l'aluminium ou l'oxyde d'aluminium (par exemple, l'aluminium anodisé) dans la chambre de traitement. Dans un mode de réalisation, le revêtement est un appareil unitaire positionné dans la chambre de traitement. Dans un mode de réalisation, le revêtement est déposé sur des parois intérieures du corps de chambre par l'intermédiaire de
Bibliography:Application Number: WO2020US31353