MICROSTRUCTURED GLASS SUBSTRATE AND METHOD FOR MANUFACTURING MICROSTRUCTURED GLASS SUBSTRATE

A microstructured glass substrate (10) has a thickness of 50-2000 μm, is opened in a first main surface (11) and has a hole which, when the microstructured glass substrate (10) is referred to as t, satisfies the following requirements: (i) 0.4≤ΦC/ΦA≤1.0; (ii) 70°≤θ≤90°; (iii)Ra≤1.0 μm; (iv) 0≤D/t≤0....

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Bibliographic Details
Main Authors MIYAUCHI Taro, FUJIMOTO Shingo, YAMADA Masayoshi, INOUE Teruhide
Format Patent
LanguageEnglish
French
Japanese
Published 23.07.2020
Subjects
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Summary:A microstructured glass substrate (10) has a thickness of 50-2000 μm, is opened in a first main surface (11) and has a hole which, when the microstructured glass substrate (10) is referred to as t, satisfies the following requirements: (i) 0.4≤ΦC/ΦA≤1.0; (ii) 70°≤θ≤90°; (iii)Ra≤1.0 μm; (iv) 0≤D/t≤0.003; and (v) 1.5≤L/ΦC≤30. L'invention concerne un substrat de verre microstructuré (10) ayant une épaisseur de 50 à 2 000 µm, qui est ouvert dans une première surface principale (11) et a un trou qui, lorsque le substrat de verre microstructuré (10) est appelé t, satisfait les exigences suivantes : (i) 0,4 ≤ ΦC/ΦA ≤ 1,0 ; (ii) 70° ≤ θ ≤ 90° ; (iii)Ra ≤ 1,0 μm ; (iv) 0 ≤ D/t ≤ 0,003 ; et (v) 1,5 ≤ L/ΦC ≤ 30. 微細構造付ガラス基板(10)は、50μm~2000μmの厚みを有し、第一主面(11)において開口しているとともに、微細構造付ガラス基板(10)をtと表すとき、(i)0.4≦ΦC/ΦA≦1.0、(ii)70°≦θ≦90°、(iii)Ra≦1.0μm、(iv)0≦D/t≦0.003、及び(v)1.5≦L/ΦC≦30の条件を満たす孔を有する。
Bibliography:Application Number: WO2019JP47507