MEMS CAPACITIVE MICROPHONE

• Main Authors: LEE, Tae Joon, KIM, Kyeong Won
• Format: Patent
• Language: English; French; Korean
• Published: 05.03.2020
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

By attaching a support plate to a support and forming an anchor supporting a diaphragm at the edge region of the support plate, a MEMS capacitive microphone of the present invention is capable of being realized as a microphone having excellent sensitivity and an excellent signal-to-noise ratio. In the MEMS capacitive microphone of the present invention, a support plate (120) from which the interior is removed in a plan view is attached to a support (110) having an end fixed to a substrate (100), an anchor (130) is attached to the edge region of the support plate (120), the edge of a diaphragm (200) is supported by the anchor (130), "the region from which the substrate is removed" in a plan view includes the anchor (130), a plurality of movable comb fingers (300) and a plurality of stiffeners are attached to the upper portion, the lower portion, or the upper and lower portions of the diaphragm (200), and fixed comb fingers (400) which are arranged at both sides of the movable comb fingers (300) at predetermined intervals in a plan view are supported by the support (110). La présente invention concerne un microphone à condensateur MEMS qui, par fixation d'une plaque de support à un support et formation d'un ancrage supportant une membrane au niveau de la région de bord de la plaque de support, peut être réalisé sous la forme d'un microphone présentant une excellente sensibilité et un excellent rapport signal sur bruit. Dans le microphone à condensateur MEMS de la présente invention, une plaque de support (120) dont l'intérieur est retiré en vue plane est fixée à un support (110) ayant une extrémité fixée à un substrat (100), un ancrage (130) est fixé à la région de bord de la plaque de support (120), le bord d'une membrane (200) est supporté par l'ancrage (130), « la région de laquelle le substrat est retiré » en vue plane comprend l'ancrage (130), une pluralité de doigts de peigne mobiles (300) et une pluralité de raidisseurs sont fixés à la partie supérieure, à la partie inférieure, ou aux parties supérieure et inférieure de la membrane (200), et des doigts de peigne fixes (400) qui sont agencés de part et d'autre des doigts de peigne mobiles (300) à intervalles prédéterminés en vue plane sont supportés par le support (110). 본 발명의 MEMS 캐패시티브 마이크로폰은 지지대에 지지판을 부착하고, 지지판의 엣지 영역에 다이아프램을 지지하는 앵커를 형성함으로써, 감도가 우수하고 신호 대 잡음비가 우수한 마이크로폰 구현이 가능해 진다. 본 발명의 MEMS 캐패시티브 마이크로폰은 기판(100)에 단부가 고정된 지지대(110)에 평면적으로 내부가 제거된 지지판(120)이 부착되고, 상기 지지판(120)의 엣지 영역에 앵커(130)가 부착되어 있으며, 상기 앵커(130)에 다이아프램(200)의 엣지가 지지되어 있고, 평면적으로 "기판이 제거된 영역"이 앵커(130)를 포함하며, 상기 다이아프램(200)에는 상부 또는 하부 또는 상부와 하부에 유동콤핑거(300) 및 스티프너가 다수 부착되어 있고, 평면적으로 유동콤핑거(300) 양측에 일정간격으로 배치된 고정콤핑거(400)를 지지대(110)가 지지하고 있는 것을 특징으로 한다.