SYSTEMS AND METHODS FOR VAPORIZATION AND VAPOR DISTRIBUTION

• Main Authors: ROGGELIN, Aaron, VORA, Nirav, POWELL, Rick, BARDEN, John
• Format: Patent
• Language: English; French
• Published: 13.02.2020
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described. La présente invention concerne des ensembles de distributeur pour des systèmes de dépôt par transport de vapeur, et des procédés de conduite d'un dépôt par transport de vapeur.