BAW RESONATOR WITH IMPROVED COUPLING, RF FILTER COMPRISING A BAW RESONATOR AND METHOD OF MANUFACTURING A BAW RESONATOR

An improved BAW resonator with an increased electroacoustic coupling is provided. The resonator has a monocrystalline piezoelectric material (MCPM) obtained by layer transfer of LN, LT or quartz between a bottom electrode (BE) and a top electrode (TE). L'invention concerne un résonateur BAW amé...

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Bibliographic Details
Main Authors TOSCANO, Giuseppe, RÖSLER, Ulrike, AIGNER, Willi, SCHIEK, Maximilian
Format Patent
LanguageEnglish
French
Published 03.10.2019
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:An improved BAW resonator with an increased electroacoustic coupling is provided. The resonator has a monocrystalline piezoelectric material (MCPM) obtained by layer transfer of LN, LT or quartz between a bottom electrode (BE) and a top electrode (TE). L'invention concerne un résonateur BAW amélioré avec un couplage électroacoustique accru. Le résonateur a un matériau piézoélectrique monocristallin (MCPM) obtenu par transfert de couche de LN, LT ou de quartz entre une électrode inférieure (BE) et une électrode supérieure (TE).
Bibliography:Application Number: WO2019EP54317