APPARATUS AND METHODS FOR INSPECTING DAMAGE INTENSITY

• Main Authors: CECALA, Christine, BITTNER, Evan James, HART, Shandon Dee, BROCKWAY, David John, DECKER, Heather Bossard, NULL, Eric Louis
• Format: Patent
• Language: English; French
• Published: 01.08.2019
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

An inspection apparatus including a light source, a sample holding stage, an image capture device, positioned to receive light from the light source after the light has interacted with a sample on the sample holding stage, and a damage metric. The damage metric includes two or more damage levels, an...