ELECTROSTATIC CHUCK DEVICE

• Main Authors: HAYAHARA Ryuuji, ISHIMURA Kazunori, KOUNO Hitoshi, KINPARA Yuuki
• Format: Patent
• Language: English; French; Japanese
• Published: 04.07.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; SEMICONDUCTOR DEVICES

This electrostatic chuck device is provided with: an electrostatic chuck unit having, as a primary surface, a mounting surface for mounting a planar test piece thereon, and provided with an electrode for electrostatic attraction; a base unit which is disposed on the side opposite to the mounting sur...