MAGNET CONTROL SYSTEM FOR MAGNETRON SPUTTERING DEVICE

• Main Authors: KO, Mu Seok, SO, Byung Ho, JUN, Myeoung Woo, KIM, Jung Gun, LEE, Gu Hyun
• Format: Patent
• Language: English; French; Korean
• Published: 04.10.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention relates to a system, for controlling a magnet, which can be used for a magnetron sputtering device. A magnet control system for a magnetron sputtering device of the present invention comprises: a driving power unit; a magnetism generation unit comprising a plurality of magnet arrays; and a magnetism control unit comprising a switch for controlling one or more of the plurality of magnet arrays such that the magnet arrays can be selectively connected to the driving power unit. La présente invention concerne un système permettant de commander un aimant et qui peut être utilisé pour un dispositif de pulvérisation magnétron. Le système de commande d'aimant destiné à un dispositif de pulvérisation magnétron selon la présente invention comprend : une unité de puissance d'entraînement ; une unité de génération de magnétisme comprenant une pluralité de réseaux d'aimants ; et une unité de commande de magnétisme comprenant un commutateur permettant de commander un ou plusieurs réseaux d'aimants parmi la pluralité de réseaux d'aimants de sorte que les réseaux d'aimants puissent être sélectivement connectés à l'unité de puissance d'entraînement. 본 발명은 마그네트론 스퍼터링 장치에 이용할 수 있는 자석을 제어하는 시스템 등에 관한 것으로, 본 발명의 마그네트론 스퍼터링 장치의 자석 제어 시스템은 구동 전원부; 자석 집합체를 복수 개 포함하는 자기 발생부; 및 상기 구동 전원부에 상기 복수 개의 자석 집합체 중 하나 이상이, 선택적으로 연결되도록 제어 가능한 스위치를 포함하는 자기 제어부;를 포함한다.