PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR

• Main Authors: MOON, Kyoung-Sik, KIM, Young-Deog, LEE, Kyung-Il, KIM, Heung-Rak
• Format: Patent
• Language: English; French; Korean
• Published: 28.06.2018
• Subjects: ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

An embodiment of the present invention provides a pressure sensor manufacturing method comprising the steps of: arranging a metal substrate having a first surface and a second surface located opposite to each other; bonding a supporting wafer to the first surface of the metal substrate; depositing an insulating film on the second surface of the metal substrate bonded to the supporting wafer; forming a piezoresistive material pattern and an electrode connected to the piezoresistive material pattern on the insulating film; forming a plurality of plate type sensing cells by cutting the metal substrate into a predetermined size and removing the supporting wafer; and bonding each of the plurality of plate type sensing cells to a base. Un mode de réalisation de la présente invention concerne un procédé de fabrication d'un capteur de pression comprenant les étapes suivantes : arrangement d'un substrat métallique ayant une première surface et une deuxième surface situées à l'opposé l'une de l'autre ; collage d'une galette support à la première surface du substrat métallique ; dépôt d'un film isolant sur la deuxième surface du substrat métallique collée à la galette support ; formation d'un motif de matériau piézorésistif et d'une électrode connectée au motif de matériau piézorésistif sur le film isolant ; formation d'une pluralité de cellules de détection de type plaque par découpe du substrat métallique en une taille prédéterminée et élimination de la galette support ; et collage de chacune de la pluralité de cellules de détection de type plaque à une base. 본 발명의 일 실시예는, 서로 반대에 위치한 제1 및 제2 면을 갖는 금속 기판을 마련하는 단계와, 상기 금속 기판의 제1 면에 지지 웨이퍼를 접합시키는 단계와, 상기 지지 웨이퍼에 접합된 금속 기판의 제2 면에 절연막을 증착하는 단계와, 상기 절연막 상에 압저항체(piezoresistive material) 패턴과 상기 압저항체 패턴에 연결된 전극을 형성하는 단계와, 상기 금속 기판을 소정의 크기로 절단하고 상기 지지 웨이퍼를 제거함으로써 복수의 판형 검출셀(plate type sensing cell)을 형성하는 단계와, 상기 복수의 판형 검출셀 각각을 베이스에 접합시키는 단계;를 포함하는 압력센서 제조방법을 제공한다.