THIN FILM INSPECTION DEVICE FOR MEASURING CHARACTERISTIC AND DEFECT OF THIN FILM

• Main Authors: PARK, Ik Keun, KIM, Joo Han, PARK, Hae Sung, KANG, Dong Chan
• Format: Patent
• Language: English; French; Korean
• Published: 28.06.2018
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

A thin film inspection device for measuring a characteristic and defect of a thin film may comprise: a pulse laser for irradiating a pump beam for generating a surface wave on a thin film; an interferometer unit which has an interfering system comprising a light beam irradiated by a continuous wave laser, and irradiates a probe beam for measuring the surface wave generated on the thin film; a reflection mirror for receiving the pump beam and probe beam, and coaxially reflecting the pump beam and probe beam; a scanning unit for receiving the pump beam and probe beam having been coaxially reflected, and irradiating the pump beam and probe beam to the thin film to scan the thin film; and a signal processing unit for measuring a characteristic and defect of the scanned thin film. L'invention concerne un dispositif d'inspection de film mince permettant la mesure d'une caractéristique et d'un défaut d'un film mince pouvant comprendre : un laser à impulsions permettant d'irradier un faisceau de pompage afin de générer une onde de surface sur un film mince ; une unité d'interféromètre possédant un système d'interférence comprenant un faisceau de lumière irradié par un laser à onde continue, et qui irradie un faisceau de sonde afin de mesurer l'onde de surface générée sur le film mince ; un miroir de réflexion permettant de recevoir le faisceau de pompe et le faisceau de sonde, et de réfléchir de manière coaxiale le faisceau de pompe et le faisceau de sonde ; une unité de balayage permettant de recevoir le faisceau de pompe et le faisceau de sonde ayant été réfléchis de manière coaxiale, et irradiant le faisceau de pompage et le faisceau de sonde vers le film mince afin de balayer le film mince ; et une unité de traitement de signal permettant de mesurer une caractéristique et un défaut du film mince balayé. 박막의 특성 및 결함을 측정하는 박막 검사 장치는 박막에 표면파를 발생하기 위한 펌프빔(Pump beam)을 조사하는 펄스 레이저, 연속 발진 레이저로부터 조사된 광선으로부터 간섭계를 형성하여 박막에 발생된 표면파를 측정하는 프로브빔(Probe beam)을 조사하는 간섭계부, 펌프빔 및 프로브빔을 수광하고, 펌프빔 및 프로브빔을 동축으로 반사시키는 반사 미러 및 동축으로 반사된 펌프빔, 프로브빔을 수광하고, 박막에 펌프빔 및 프로브빔을 조사하여 박막을 스캔하는 스캐닝부 및 상기 스캔된 박막의 특성 및 결함을 측정하는 신호 처리부를 포함할 수 있다.