SIX-DEGREE-OF-FREEDOM MICRODISPLACEMENT REGULATING DEVICE FOR OPTICAL ELEMENT, PROJECTION OBJECTIVE AND LITHOGRAPHY MACHINE

Disclosed is a six-degree-of-freedom microdisplacement regulating device, the device comprising a lens cone (12). Three regulating branched chains (13) are mounted on an upper surface of the lens cone (12). Each regulating branched chain (13) provides two-degree-of-freedom displacement regulation. A...

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Bibliographic Details
Main Authors ZHANG, Defu, NI, Mingyang, LI, Xianling, SUI, Yongxin, YANG, Huaijiang
Format Patent
LanguageChinese
English
French
Published 03.05.2018
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:Disclosed is a six-degree-of-freedom microdisplacement regulating device, the device comprising a lens cone (12). Three regulating branched chains (13) are mounted on an upper surface of the lens cone (12). Each regulating branched chain (13) provides two-degree-of-freedom displacement regulation. A supporting lens frame (14) is mounted on an upper surface of the three regulating branched chains (13). A supporting lens frame (15) can generate displacement under the drive of each regulating branched chain (13) in two degrees of freedom. An optical element (5) is fixed in the supporting lens frame (15), which can realize six-degree-of-freedom displacement regulation for the optical element (5) under the drive of the three regulating branched chains (13), effectively improving the precision of displacement regulation for the optical element (5). L'invention concerne un dispositif de régulation de microdéplacement à six degrés de liberté, le dispositif comprenant un cône de lentille (12). Trois chaînes ramifiées
Bibliography:Application Number: WO2016CN104017