SCANNING PROBE AND ELECTRON MICROSCOPE PROBES AND THEIR MANUFACTURE

Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotat...

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Bibliographic Details
Main Authors LEE, Jinju, GIROLAMI, Gregory S, LOCKLEDGE, Scott P, LYDING, Joseph W
Format Patent
LanguageEnglish
French
Published 15.02.2018
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements. Cette invention concerne des procédés de fabrication économique de pointes de sonde de microscopes en champ proche et électronique (SPEM). Dans ce procédé, de multiples fils sont montés sur un étage usinés par bombardement électronique tandis que l'étage et les sondes montées sont inclinés à un angle sélectionné par rapport à la source d'ions et entraînés en rotation. L'invention concerne en outre les sondes ainsi obtenues. Le procédé fournit des ensembles de pointes de sonde hautement uniformes ayant des propriétés contrôlables pour des mesures stables et précises de microscopes en champ proche et électroniques (EM).
Bibliography:Application Number: WO2017US46000