CONDUCTOR-FORMING DEVICE AND CONDUCTOR-MANUFACTURING METHOD

A conveying device 11 continuously conveys a base 1 in a virtually vertical standing orientation in at least the range from a developing device 12 to a pattern-plating device 13 within the overall area of a conveyance path 20 reaching from the developing device 12 to an etching device 15 via the pat...

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Bibliographic Details
Main Authors FUJIKAWA, Osamu, NAKAYAMA, Yoshio, AKIMOTO, Yutaka, AKIYAMA, Masanori
Format Patent
LanguageEnglish
French
Japanese
Published 05.10.2017
Subjects
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Summary:A conveying device 11 continuously conveys a base 1 in a virtually vertical standing orientation in at least the range from a developing device 12 to a pattern-plating device 13 within the overall area of a conveyance path 20 reaching from the developing device 12 to an etching device 15 via the pattern-plating device 13 and a peeling device 14. Un dispositif de transport 11 transporte en continu une base 1 suivant une orientation sensiblement verticale au moins dans la plage allant d'un dispositif de développement 12 à un dispositif de dépôt de motifs 13 dans la zone globale d'un trajet de transport 20 allant du dispositif de développement 12 jusqu'à un dispositif de gravure 15 en passant par le dispositif de dépôt de motifs 13 et un dispositif de pelage 14. 搬送装置11は、現像装置12からパターンめっき装置13及び剥離装置14を経由してエッチング装置15に至る搬送経路20の全域のうち、少なくとも現像装置12からパターンめっき装置13までの範囲において、基材1を略鉛直に起立した姿勢で連続的に搬送する。
Bibliography:Application Number: WO2016JP60872