TUNABLE LASER AND PREPARATION METHOD THEREOF

• Main Authors: LEI, Hongbing, SHEN, Xiao Andy, HE, Jifang, CHEN, Hongmin
• Format: Patent
• Language: Chinese; English; French
• Published: 28.09.2017
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

A thermally tuned, wavelength-tunable laser (400). The laser comprises a heating layer (410), a dielectric layer, a reflector (430), a transport layer (420), a support layer (440) and a substrate layer (450), wherein the heating layer is disposed above the transport layer; the transport layer is disposed above the support layer, and the transport layer comprises, from top to bottom, an upper cladding layer (421), a waveguide layer (422) and a lower cladding layer (423); the reflector is disposed in the transport layer; the support layer is disposed between the transport layer and the substrate layer and has a protective structure (441), the protective structure forming a hollow structure together with the transport layer and the substrate layer, and the hollow portion has a support structure (442); the substrate layer is disposed below the support layer. The heating layer, the reflector and a part of the transport layer form a suspended structure, so that heat loss can be prevented. The laser adopts a bottom