BEAM HOMOGENIZER FOR SURFACE MODIFICATION

• Main Authors: HONG, Kyung Hee, HWANG, Seung Jin, YU, Tae Jun, KIM, Tae Shin, SIN, Yoong Wook
• Format: Patent
• Language: English; French; Korean
• Published: 10.08.2017
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES USING STIMULATED EMISSION; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

A beam homogenizer for surface modification, according to the present invention, comprises: a first array lens which splits a laser beam irradiated from a laser beam irradiation unit into multiple beamlets, and comprises multiple lenslets determining the shape of the laser beam; a second array lens which transmits the multiple beamlets split by means of the first array lens, and comprises multiple lenslets corresponding to the first array lens; and a light-condensing lens which condenses, on a surface of an object, the multiple beamlets transmitted through the second array lens. Further, the beam homogenizer for surface modification comprises at least one among: a plasma occurrence prevention unit which is provided between the first array lens and the second array lens, and prevents plasma from occurring in focal regions of the beamlets; and a damage prevention unit which is provided between the light-condensing lens and the object, and prevents the light-condensing lens from being damaged by energy generated in the process of the multiple beamlets being irradiated on the object. La présente invention concerne un homogénéisateur de faisceau pour modification de surface comprenant : une première lentille de réseau qui divise un faisceau laser émis par une unité de rayonnement de faisceau laser en de multiples petits faisceaux, et comprend de multiples petites lentilles déterminant la forme du faisceau laser ; une deuxième lentille de réseau qui transmet les multiples petits faisceaux divisés au moyen de la première lentille de réseau, et comprend de multiples petites lentilles correspondant à la première lentille de réseau ; et une lentille de condensation de lumière qui condense, sur une surface d'un objet, les multiples petits faisceaux transmis à travers la deuxième lentille de réseau. En outre, l'homogénéisateur de faisceau pour modification de surface comprend au moins une unité parmi : une unité de protection contre l'apparition de plasma qui se situe entre la première lentille de réseau et la deuxième lentille de réseau, et empêche le plasma de se produire dans des zones focales des petits faisceaux ; et une unité de protection contre l'endommagement qui se situe entre la lentille de condensation de lumière et l'objet, et empêche la lentille de condensation de lumière d'être endommagée par l'énergie produite lors du processus de multiples petits faisceaux rayonnant sur l'objet. 본 발명에 따른 표면개질용 빔균질기는, 레이저빔 조사유닛으로부터 조사되는 레이저빔을 복수의 빔렛으로 분할하며, 상기 레이저빔의 형상을 결정하는 복수의 렌즈렛을 포함하는 제1배열렌즈, 상기 제1배열렌즈에 의해 분할된 복수의 빔렛을 투과시키며, 상기 제1배열렌즈에 대응되는 복수의 렌즈렛을 포함하는 제2배열렌즈, 상기 제2배열렌즈를 투과한 복수의 빔렛을 대상의 표면에 집광시키는 집광렌즈를 포함하며, 상기 제1배열렌즈와 상기 제2배열렌즈 사이에 구비되어, 상기 빔렛의 초점 영역에서 플라즈마가 발생하는 것을 방지하는 플라즈마 발생 방지부 및 상기 집광렌즈와 상기 대상 사이에 구비되어, 상기 복수의 빔렛이 상기 대상에 조사되는 과정에서 발생되는 에너지에 의해 상기 집광렌즈가 손상되는 것을 방지하는 손상방지부 중 적어도 어느 하나를 포함한다.