METHOD FOR NANOMODULATING METAL FILMS BY MEANS OF HIGH-VACUUM CATHODE SPUTTERING OF METALS AND STENCILS

• Main Authors: CASAGRANDE DENARDIN, Juliano, PALMA SOLORZA, Juan Luis, ESCRIG MURUA, Juan Eduardo
• Format: Patent
• Language: English; French; Spanish
• Published: 18.05.2017
• Subjects: APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTROFORMING; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; METALLURGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

The present invention relates to a method for nanomodulating metal films by means of high-vacuum cathode sputtering of metals, and to stencils of anodised Al. As an example of the use of these nanomodulated metal films, the synthesis or production of a magnetically weak film by means of cathode sputtering, which film can be used as a magnetic field sensor, and a metal nanomodulated stencil are analysed. La presente invención se refiere a un método de nanomodulación de películas metálicas mediante pulverización catódica de metales en alto vacío y plantillas de Al anodizado. Como ejemplo de uso de estas películas metálicas nanomoduladas, se analiza la síntesis u obtención de una película magnéticamente blanda mediante pulverización catódica - que puede ser usada como sensor de campo magnético, y una plantilla nanomodulada metálica. La présente invention concerne un procédé de nanomodulation de pellicules métalliques à l'aide d'une pulvérisation cathodique de métaux sous vide poussé et de modèles d'Al anodisé. Comme exemple d'utilisation de ces pellicules métalliques nanomodulées, on étudie la synthèse ou l'obtention d'une pellicule à caractère magnétique doux à l'aide d'une pulvérisation cathodique - qui pourrait être utilisée comme capteur de champ magnétique, et d'un modèle nanomodulé métallique.