CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS

• Main Authors: NELSON, Michael, Leo, CHIEDA, Michael, Andrew, KOEVOETS, Adrianus, Hendrik, UITTERDIJK, Tammo, VAN DER SANDEN, Jacobus, Cornelis, Gerardus, LAFARRE, Raymond, Wilhelmus, Louis, O'CONNOR, Geoffrey
• Format: Patent
• Language: English; French
• Published: 13.04.2017
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

A lithographic apparatus includes a clamp (406) configured to receive an object (402). The clamp defines at least one channel (408) configured to pass a fluid at a first fluid temperature. The lithographic apparatus also includes a chuck (404) coupled to the clamp. The chuck (404) defines at least one void (464) configured to thermally insulate the chuck from the clamp. L'invention concerne un appareil lithographique qui comprend une pince (406) conçue pour recevoir un objet (402). La pince définit au moins un canal (408) conçu pour faire passer un fluide à une première température de fluide. L'appareil lithographique comprend également un mandrin (404) accouplé à la pince. Le mandrin (404) définit au moins un vide (464) conçu pour isoler thermiquement le mandrin de la pince.