METHOD FOR MANUFACTURING ROLL MASTER FOR NANO-IMPRINTING PROCESS, FOR IMPLEMENTING ANTI-REFLECTION PATTERN

• Main Authors: CHAE, Joo Hyun, SHIN, Myung Dong, KIM, Sung Hoon, HUR, Ji Won, SEO, Sang Hyun
• Format: Patent
• Language: English; French; Korean
• Published: 20.10.2016
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTROFORMING; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METALLURGY; PERFORMING OPERATIONS; POLISHING; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Disclosed is a method for manufacturing a mold for an anti-reflection film, which can increase anodic oxidation efficiency and form uniform nanostructures. The present invention performs a preparation step of preparing a stamper which has high purity aluminum deposited on the surface thereof; and a pore formation step of forming porous pores having dented marks by subjecting the stamper to anodic oxidation. L'invention concerne un procédé de fabrication d'un moule pour film anti-reflet, qui peut augmenter l'efficacité d'oxydation anodique et former des nanostructures uniformes. La présente invention comprend une étape de préparation consistant à préparer une matrice à la surface de laquelle est déposé de l'aluminium de pureté élevée ; et une étape de formation de pores consistant à former des pores poreux ayant des marques en creux en soumettant la matrice à une oxydation anodique. 본 발명은 양극산화 효율을 증가시키고 균일한 나노구조체의 형성이 가능한 반사방지필름용 몰드 제조방법을 개시한다. 본 발명은 고순도 알루미늄이 표면에 증착된 스템퍼를 준비하는 준비단계와, 상기 스템퍼에 양극산화를 실시하여 음각을 이루는 다공성 포어(pore)를 형성하는 포어 형성단계를 실시한다.