ELECTRODE AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF

An electrode and manufacturing method thereof, and array substrate and manufacturing method thereof. The electrode manufacturing method comprises: forming a ZnON material layer on a metal electrode layer (10); etching the ZnON material layer to form a microlens structure layer (11); and forming a tr...

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Bibliographic Details
Main Authors YAN, Liangchen, WANG, Dongfang, SHANGGUAN, Ronggang
Format Patent
LanguageChinese
English
French
Published 09.09.2016
Subjects
ELECTRICITY
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Summary:An electrode and manufacturing method thereof, and array substrate and manufacturing method thereof. The electrode manufacturing method comprises: forming a ZnON material layer on a metal electrode layer (10); etching the ZnON material layer to form a microlens structure layer (11); and forming a transparent electrode layer (12) on the microlens structure layer (11). Since the ZnON material is used as the material for forming the microlens structure layer, when the microlens structure is formed by etching, a weaker alkaline or acid solution can be used to prevent the metal electrode layer from being corroded. La présente invention concerne une électrode et son procédé de fabrication, et un substrat de réseau et son procédé de fabrication. Le procédé de fabrication d'électrode consiste à : former une couche de matériau à base de ZnON sur une couche d'électrode métallique (10) ; graver la couche de matériau à base de ZnON en vue de former une couche de structure de microlentilles (11) ; et former une couche d'é
Bibliography:Application Number: WO2015CN83729