MANUFACTURING METHOD FOR DEPOSITION MASK, METAL SHEET USED FOR PRODUCING DEPOSITION MASK, AND MANUFACTURING METHOD FOR SAID METAL SHEET

• Main Authors: IKENAGA Chikao, IKEDA Kazunari, NAKAYAMA Hiroaki, HATSUTA Chiaki, OOUCHI Utako
• Format: Patent
• Language: English; French; Japanese
• Published: 18.08.2016
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention provides a metal sheet, on a first surface of which a resist pattern having a narrow width can be stably provided. This manufacturing method for a metal sheet includes a preparation step for preparing a sheet material comprising an iron alloy that contains nickel. When a composition analysis of the first surface of the metal sheet obtained from the sheet material is performed using X-ray photoelectron spectroscopy, the resulting ratio A1/A2 does not exceed 0.4, where A1 is the sum of the peak area value of nickel oxide and the peak area value of nickel hydroxide, and A2 is the sum of the peak area value of iron oxide and the peak area value of iron hydroxide. La présente invention concerne une feuille de métal, sur une première surface de laquelle un motif de réserve de faible largeur peut être fourni de manière stable. Le procédé de fabrication d'une feuille de métal selon l'invention comprend une étape de préparation consistant à préparer un matériau en feuille comportant un alliage de fer contenant du nickel. Lorsqu'une analyse de la composition de la première surface de la feuille de métal obtenue à partir du matériau en feuille est effectuée par spectroscopie photoélectronique aux rayons X, le rapport résultant A1/A2 ne dépasse pas 0,4, A1 étant la somme de la valeur de surface du pic d'oxyde de nickel et de la valeur de surface du pic d'hydroxyde de nickel et A2 étant la somme de la valeur de surface du pic d'oxyde de fer et la valeur de surface du pic d'hydroxyde de fer. 　第１面上に狭い幅のレジストパターンを安定に設けることができる金属板を提供する。金属板の製造方法は、ニッケルを含む鉄合金からなる板材を準備する準備工程を備えている。板材から得られる金属板の第１面の組成分析を、Ｘ線光電子分光法を用いて実施した結果として得られる、ニッケル酸化物のピーク面積値とニッケル水酸化物のピーク面積値との和をＡ１とし、鉄酸化物のピーク面積値と鉄水酸化物のピーク面積値との和をＡ２とする場合、Ａ１／Ａ２が０．４以下になっている。