DEPOSITION DEVICE AND DEPOSITION METHOD

• Main Authors: TAKIZAWA, KAZUO, KOBAYASHI, YUHKI, KAWATO, SHINICHI, NIBOSHI, MANABU
• Format: Patent
• Language: English; French; Japanese
• Published: 11.08.2016
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

When viewed in a plan view, a magnetic plate (10) has a first magnetic section (11) and a second magnetic section (12), and a magnetic section boundary (14) is slanted with respect to opening sides (26) and bent or curved so that magnetic fields exist along a plurality of mutually different directions. Lorsqu'elle est vue en plan, une plaque magnétique (10) présente une première section magnétique (11) et une seconde section magnétique (12), et une limite de sections magnétiques (14) est inclinée par rapport aux côtés d'ouverture (26) et courbée ou incurvée de sorte que des champs magnétiques soient présents le long d'une pluralité de directions réciproquement différentes. 　平面視で、マグネットプレート（１０）は、第１磁区（１１）と第２磁区（１２）とを有しており、磁区境界線（１４）は、開口辺（２６）に対して傾斜しているとともに、屈曲または湾曲しており、互いに異なる複数の方向に沿った磁界が存在する。