SUBSTRATE LIQUID PROCESSING DEVICE

A substrate liquid processing device according to an embodiment is provided with a transportation part, a processing part, a storage part, and a liquid feed mechanism. A transportation device for transporting a substrate is disposed in the transportation part. The processing part is horizontally adj...

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Bibliographic Details
Main Authors KOMIYA HIROSHI, TAKAKI YASUHIRO, TANAKA KOJI, UMENO SHINICHI, ANAMOTO ATSUSHI, SATOH TAKAMI
Format Patent
LanguageEnglish
French
Japanese
Published 23.06.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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