CHARGED PARTICLE BEAM APPARATUS

• Main Authors: HISADA AKIKO, SHOUJI MINAMI, OKUMURA TAIGA, YONEYAMA AKIO, OOMINAMI YUUSUKE, OHSHIMA TAKASHI
• Format: Patent
• Language: English; French; Japanese
• Published: 02.06.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The purpose of the present invention is to facilitate convenient observation of the three-dimensional internal structure of a sample being observed through an optical microscope with a charged particle microscope while accurately measuring the three-dimensional positional relationship and the densit...