ELECTRET ELEMENT, MICROPHONE EQUIPPED WITH SAID ELECTRET ELEMENT, AND METHOD FOR MANUFACTURING SAID ELECTRET ELEMENT

• Main Authors: SUZUKI, MASATO, ARIOKA, SHINICHI, NISHIMORI, YUKI, HASHIGUCHI, GEN, ISHIBASHI, KAZUNORI
• Format: Patent
• Language: English; French; Japanese
• Published: 28.04.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE; DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

This electret element has an electret layer including silicon oxide, and an aluminum oxide protective layer deposited on the electret layer by means of an atomic layer deposition method. Cet élément à électret a une couche d'électret comprenant de l'oxyde de silicium, et une couche de protection d'oxyde d'aluminium déposée sur la couche d'électret au moyen d'un procédé de dépôt de couche atomique. 　エレクトレット素子は、酸化シリコンを含むエレクトレット膜と、エレクトレット膜の上に形成された、原子層堆積法で堆積させた酸化アルミニウムの保護膜とを有する。