SUBSTRATE PRE-PROCESSING METHOD AND DEVICE

• Main Authors: WU, TSUNGYUAN, ZOU, QINGHUA
• Format: Patent
• Language: Chinese; English; French
• Published: 17.12.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A substrate pre-processing method and device, the processing method comprising the following steps: step 1, providing a substrate (10) to be pre-processed, a UV chamber (20) and a loading chamber (60); step 2, disposing a delivery chamber (40) between the UV chamber and the loading chamber to connec...