SUBSTRATE PRE-PROCESSING METHOD AND DEVICE

• Main Authors: WU, TSUNGYUAN, ZOU, QINGHUA
• Format: Patent
• Language: Chinese; English; French
• Published: 17.12.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A substrate pre-processing method and device, the processing method comprising the following steps: step 1, providing a substrate (10) to be pre-processed, a UV chamber (20) and a loading chamber (60); step 2, disposing a delivery chamber (40) between the UV chamber and the loading chamber to connect the UV chamber and the loading chamber, disposing a first closing door (24) at a connection part between the UV chamber and the delivery chamber, and disposing a second closing door (62) at the connection part between the delivery chamber and the loading chamber, the delivery chamber being formed into an enclosed chamber after closing the first and second closing doors; step 3, delivering the substrate to be pre-processed into the UV chamber; step 4, closing the UV chamber, and conducting UV processing after aerating the UV chamber with dry oxygen; step 5, after completing the UV processing, opening the first closing door, and delivering the substrate into the delivery chamber; step 6, after the substrate is comp