USE OF AN ETCH STOP IN THE MIM CAPACITOR DIELECTRIC OF A MMIC

• Main Author: MCCLYMONDS, JAMES, W
• Format: Patent
• Language: English; French
• Published: 10.12.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A structure having: a body; a pair of capacitors disposed over different portions of a surface of the body; a first one of the capacitors having an upper conductor and a lower conductor separated a dielectric layer; and a second one of the pair of capacitors having an upper conductor and a lower con...