HEAT-RESISTANT ADHESIVE SHEET FOR SEMICONDUCTOR INSPECTION AND SEMICONDUCTOR INSPECTION METHOD
Provided is a heat-resistant adhesive sheet in which deformation of the adhesive sheet as a result of heating does not readily occur. The adhesive sheet, which is formed by laminating an adhesive agent layer on a substrate, is characterised in that: the substrate exhibits a heat shrinkage property;...
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Main Authors | , |
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Format | Patent |
Language | English French Japanese |
Published |
19.11.2015
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Subjects | |
Online Access | Get full text |
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