LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

The laser device in one perspective of the present disclosures may contain: an oscillator that outputs laser light; a slab-shaped light amplifier that amplifies and outputs the laser light output from the oscillator by means of causing same to pass through a slab-shaped light amplification region; a...

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Bibliographic Details
Main Author KUROSAWA, YOSHIAKI
Format Patent
LanguageEnglish
French
Japanese
Published 13.08.2015
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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