RADIATION SOURCE
A radiation system for generating a radiation emitting plasma, the radiation system comprising a fuel emitter (3) for providing a fuel target at a plasma formation region (4), a first laser (1) arranged to provide a first laser beam (2) at the plasma formation region incident on the fuel target to g...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English French |
Published |
21.05.2015
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Subjects | |
Online Access | Get full text |
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