OPTICAL MODULE

An optical module (1A) is provided with: a semiconductor substrate (2); an electrostatic actuator (10) that has a fixed section (11), which is fixed to the semiconductor substrate (2), and a movable section (12), which is moved with respect to the fixed section (11) by means of an electrostatic forc...

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Bibliographic Details
Main Author WARASHINA YOSHIHISA
Format Patent
LanguageEnglish
French
Japanese
Published 09.04.2015
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
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