RADIATION COLLECTOR, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence re...

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Main Authors CADEE, THEODORUS, SCHEEPERS, MARCUS, LOOPSTRA, ERIK, FRIJNS, OLAV, KEMPEN, ANTONIUS, VANDERHALLEN, IVO, BEERENS, RUUD, BIELING, STIG, STRUYCKEN, ALEXANDER, VAN LIESHOUT, RICHARD, DONDERS, SJOERD, TEN KATE, NICOLAAS
Format Patent
LanguageEnglish
French
Published 02.10.2014
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
GAMMA RAY OR X-RAY MICROSCOPES
HOLOGRAPHY
IRRADIATION DEVICES
MATERIALS THEREFOR
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
X-RAY TECHNIQUE
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Summary:A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a second location at said distance from the radiation collector, wherein the first location and the second location are separated from one another. L'invention concerne un collecteur de rayonnement comprenant un premier segment collecteur comprenant une pluralité de coques réflectrices d'incidence rasante servant à diriger le rayonnement pour qu'il converge dans un premier emplacement à une certaine distance du collecteur de rayonnement, un second segment collecteur comprenant une pluralité de coques réflectrices d'incidence rasante servant à diriger le rayonnement pour qu'il converge vers un second emplacement à ladite distance du collecteur de rayonnement, le premier emplacement et le second emplacement étant séparés l'un de l'autre.
Bibliography:Application Number: WO2014EP53753