INTEGRATED APERTURED MICROMIRROR AND APPLICATIONS THEREOF

An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically c...

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Bibliographic Details
Main Authors SABRY, YASSER, M, SADEK, MOHAMED, KHALIL, DIAA ABDEL, MAGED
Format Patent
LanguageEnglish
French
Published 25.09.2014
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Summary:An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically coupled to receive an incident beam having an optical axis in a plane of the substrate and to at least partially transmit the incident beam therethrough via the aperture. La présente invention concerne un micro-miroir ouvert intégré, le micro-miroir étant monolithiquement intégré à un banc micro-optique fabriqué sur un substrat par lithographie et selon une technique de gravure profonde. Le micro-miroir présente une ouverture en son sein et est orienté de telle sorte que le micro-miroir est couplé optiquement pour recevoir un faisceau incident ayant un axe optique dans un plan du substrat et pour transmettre au moins partiellement le faisceau incident à travers le substrat par l'intermédiaire de l'ouverture.
Bibliography:Application Number: WO2014US30268