BURIED HARD MASK FOR EMBEDDED SEMICON-DUCTOR DEVICE PATTERNING

• Main Authors: HUI, ANGELA, TAI, CHAN, SIMON, S, BELL, SCOTT, A
• Format: Patent
• Language: English; French
• Published: 10.07.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Methods and apparatus for manufacturing semiconductor devices, and such semiconductor devices, are described. According to various aspects of the disclosure, a semiconductor device can be manufactured by forming a core region of the semiconductor device and forming a periphery region of the semicond...