FILM FORMATION APPARATUS
This film formation apparatus is provided with: a processing container; an exhaust device; an inner-side support part; an outer-side support part; at least one placement table; a gas supply part; and a heater part. The inner-side support part has a cylindrical shape, and is provided capable of rotat...
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Main Author | |
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Format | Patent |
Language | English French Japanese |
Published |
12.06.2014
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Subjects | |
Online Access | Get full text |
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