ION SOURCE HAVING A SHUTTER ASSEMBLY

• Main Authors: BLAHNIK, JEFFREY CHARLES, WEAVER, WILLIAM T
• Format: Patent
• Language: English; French
• Published: 24.04.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

An ion source includes arc chamber housing defining an arc chamber. The arc chamber housing has an extraction plate in a fixed position, and the extraction plate defines a plurality of extraction apertures. The ion source also includes a shutter assembly positioned outside of the arc chamber proxima...