RAPID HEAT TREATMENT SYSTEM FOR THIN FILM OF SOLAR CELL

The present invention relates to a rapid heat treatment system for a thin film of a solar cell. The rapid heat treatment system for the thin film of the solar cell according to the present invention comprises: a chamber for forming a storage space; a casing for forming an enclosed space in which a s...

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Bibliographic Details
Main Authors PARK, SANG HYUN, JEON, KWANG JIN, YOO, SANG WOO, CHA, JAE JUNG, KIM, JOO WON
Format Patent
LanguageEnglish
French
Korean
Published 19.12.2013
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Summary:The present invention relates to a rapid heat treatment system for a thin film of a solar cell. The rapid heat treatment system for the thin film of the solar cell according to the present invention comprises: a chamber for forming a storage space; a casing for forming an enclosed space in which a substrate is arranged; a lamp for heating the substrate; and an injection unit for injecting a reaction gas into the enclosed space. La présente invention se rapporte à un système de traitement thermique rapide d'un mince film d'une cellule solaire. Le système de traitement thermique rapide d'un mince film de la cellule solaire selon la présente invention comprend : une chambre destinée à former un espace de stockage ; un boîtier destiné à former un espace fermé dans lequel est agencé un substrat ; une lampe destinée à chauffer le substrat ; et une unité d'injection destinée à injecter un gaz de réaction dans l'espace fermé.
Bibliography:Application Number: WO2013KR04878