METHOD FOR MANUFACTURING A TCO LAYER

• Main Authors: POPPELLER, MARKUS, GOSSLA, MARIO
• Format: Patent
• Language: English; French
• Published: 03.04.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

This disclosure relates to a method to generate transparent conductive oxide (TCO) layers using at least a ratio of water (H20) and diethyl zinc (DEZ). A range of H20/DEZ values may be used to impart varying sheet resistance values to the TCO layers. In one embodiment, the TCO layers may be used to form a device that may absorb or reflect/emit light. La présente invention a trait à un procédé permettant de générer des couches d'oxyde conducteur transparent (OCT) à l'aide d'au moins un rapport d'eau (H20) et de diéthylzinc (DEZ). Une plage de valeurs H20/DEZ peut être utilisée pour conférer des valeurs de résistance de feuille variables aux couches OCT. Dans un mode de réalisation, les couches OCT peuvent être utilisées pour former un dispositif qui peut absorber ou réfléchir/émettre de la lumière.