CHEMICAL SENSOR WITH CONDUCTIVE CUP-SHAPED SENSOR SURFACE

• Main Authors: BUSTILLO, JAMES, LI, SHIFENG, HINZ, WOLFGANG
• Format: Patent
• Language: English; French
• Published: 03.10.2013
• Subjects: BEER; BIOCHEMISTRY; CHEMISTRY; COMPOSITIONS OR TEST PAPERS THEREFOR; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL ORENZYMOLOGICAL PROCESSES; ENZYMOLOGY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEICACIDS OR MICROORGANISMS; METALLURGY; MICROBIOLOGY; MUTATION OR GENETIC ENGINEERING; PHYSICS; PROCESSES OF PREPARING SUCH COMPOSITIONS; SPIRITS; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TESTING; VINEGAR; WINE

A chemical detection device and a method of its manufacture is described herein. The device includes a chemically-sensitive field effect transistor 214 including a floating gate conductor 218 having an upper surface 220. A dielectric material 210 defines a cavity 201 extending to the upper surface of the floating gate conductor. A conductive layer 250 is on a sidewall 260 of the cavity and electrically communicating with the floating gate conductor 220. An inner surface 251 of the conductive layer 250 defines a well 201 for the sensor. L'invention concerne, selon un mode de réalisation, un dispositif de détection chimique. Le dispositif comprend un transistor à effet de champ chimiquement sensible comprenant un conducteur à grille flottante ayant une surface supérieure. Un matériau diélectrique définit une cavité qui s'étend à partir de la surface supérieure du conducteur à grille flottante. Une couche conductrice est disposée sur une paroi latérale de la cavité et communique électriquement avec le conducteur à grille flottante. Une surface intérieure de la couche conductrice définit un puits pour le capteur.