METHOD AND STRUCTURE OF OPTICAL THIN FILM USING CRYSTALLIZED NANO-POROUS MATERIAL

• Main Authors: XI, JINGQUN, MONT, FRANK
• Format: Patent
• Language: English; French
• Published: 20.02.2014
• Subjects: GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TRANSPORTING

Techniques for an optical filter having robust crystallized nano-porous layers are disclosed herein. According to at least one embodiment, the optical filter includes a light-transmitting substrate and an optical coating. The optical coating is deposited on the light-transmitting substrate. The optical coating includes at least one crystallized nano-feature layer. The at least one crystallized nano-feature layer is deposited using high temperature oblique angle deposition and has a refractive index lower than a refractive index of the light-transmitting substrate. L'invention concerne des techniques pour un filtre optique ayant des couches nanoporeuses cristallisées robustes. Conformément à au moins un mode de réalisation, le filtre optique comprend un substrat transmettant la lumière et un revêtement optique. Le revêtement optique est déposé sur le substrat transmettant la lumière. Le revêtement optique comprend au moins une couche de dimension nanométrique cristallisée. La ou les couches de dimension nanométrique cristallisées est ou sont déposées à l'aide d'un dépôt sous angle oblique à haute température et a un indice de rétraction inférieur à un indice de rétraction du substrat transmettant la lumière.