TRANSPARENT CONDUCTIVE FILM LAMINATE, METHOD FOR PRODUCING SAME, THIN-FILM SOLAR CELL, AND METHOD FOR PRODUCING SAME

• Main Authors: MATSUMURA, FUMIHIKO, SOGABE, KENTARO, YAMANOBE, YASUNORI
• Format: Patent
• Language: English; French; Japanese
• Published: 27.06.2013
• Subjects: BASIC ELECTRIC ELEMENTS; CABLES; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONDUCTORS; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INSULATORS; METALLURGY; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

Provided is a transparent conductive film laminate which exhibits excellent contact properties with an Si layer, exerts an excellent light confinement effect, and is useful as the surface electrode of a solar cell. Also provided are a method for producing said transparent conductive film laminate, a thin-film solar cell, and a method for producing same. The transparent conductive film laminate is formed as a three-layer laminate structure in which an indium oxide transparent conductive film (I) (21) formed on a translucent substrate (1) functions as a base, and a zinc oxide transparent conductive film (II) (22) exhibiting excellent concavo-convex properties and a transparent conductive film (III) (23) having a high work function are formed in said order on the indium oxide transparent conductive film (I) (21). La présente invention concerne un stratifié de couches conductrices transparentes qui présente d'excellentes propriétés de contact avec une couche de Si, exerce une excellente action de confinement de la lumière, et peut servir d'électrode de surface d'une photopile. Il est également prévu un procédé de production dudit stratifié de couches conductrices transparentes, une photopile à couche mince et son procédé de fabrication. Le stratifié de couches conductrices transparentes se présente sous la forme d'une structure stratifiée à trois couches dans laquelle une couche conductrice transparente d'oxyde d'indium (I) (21) formée sur un substrat translucide (1) sert de base, et une couche conductrice transparente d'oxyde de zinc (II) (22) présentant d'excellentes propriétés concavo-convexes et une couche conductrice transparente (III) (23) présentant un fort travail d'extraction sont formées dans cet ordre, sur ladite couche conductrice transparente d'oxyde d'indium (I) (21).