POLYSILOXAZANE HYDROXIDE THIN-FILM RINSE SOLUTION, AND POLYSILOXAZANE HYDROXIDE THIN-FILM PATTERN-FORMING METHOD USING SAME

Provided is a polysiloxazane hydroxide thin-film rinse solution comprising, with respect to the rinse solution as a whole, between 0.01 wt.% and 7 wt.% of an additive selected from the group consisting of alcohol-based solvents, ester-based solvents, silanol-based solvents, alkoxysilane-based solven...

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Main Authors KIM, SANG-KYUN, LEE, JIN-WOOK, YUN, HUIAN, KIM, BONG-HWAN, BAE, JIN-HEE, LIM, SANG-HAK, KWAK, TAEK-SOO
Format Patent
LanguageEnglish
French
Korean
Published 16.05.2013
Subjects
ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES
BASIC ELECTRIC ELEMENTS
CANDLES
CHEMISTRY
DETERGENT COMPOSITIONS
DETERGENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FATTY ACIDS THEREFROM
METALLURGY
RECOVERY OF GLYCEROL
RESIN SOAPS
SEMICONDUCTOR DEVICES
SOAP OR SOAP-MAKING
USE OF SINGLE SUBSTANCES AS DETERGENTS
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Summary:Provided is a polysiloxazane hydroxide thin-film rinse solution comprising, with respect to the rinse solution as a whole, between 0.01 wt.% and 7 wt.% of an additive selected from the group consisting of alcohol-based solvents, ester-based solvents, silanol-based solvents, alkoxysilane-based solvents and alkyl silazane based solvents and combinations thereof. Solution de rinçage formant film mince d'hydroxyde de polysiloxazane comprenant, par rapport à la solution de rinçage dans son ensemble, entre 0,01 et 7 % en poids d'un additif choisi dans le groupe constitué par les solvants à base d'alcools, les solvants à base d'esters, les solvants à base de silanols, les solvants à base d'alcoxysilanes et les solvants à base d'alkylsilazanes et leurs combinaisons.
Bibliography:Application Number: WO2012KR09044