ROBOT SYSTEMS, APPARATUS, AND METHODS ADAPTED TO TRANSPORT DUAL SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING

Substrate transport systems and robot apparatus are described. The systems are adapted to efficiently pick or place a substrate at a destination by independently rotating an upper arm, a forearm, and dual wrist members relative to each other and a base. Methods of operating the robot apparatus are p...

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Bibliographic Details
Main Authors HUDGENS, JEFFREY C, KREMERMAN, IZYA, COX, DAMON KEITH
Format Patent
LanguageEnglish
French
Published 10.05.2013
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:Substrate transport systems and robot apparatus are described. The systems are adapted to efficiently pick or place a substrate at a destination by independently rotating an upper arm, a forearm, and dual wrist members relative to each other and a base. Methods of operating the robot apparatus are provided, as are numerous other aspects. L'invention concerne des systèmes de transport de substrat et un appareil robotisé. Les systèmes sont conçus pour saisir ou placer efficacement un substrat à une certaine destination par la rotation indépendante d'un bras supérieur, d'un avant-bras et de deux éléments poignets les uns par rapport aux autres et par rapport à une base. Des procédés de fonctionnement de l'appareil robotisé sont décrits, tout comme de nombreux autres aspects.
Bibliography:Application Number: WO2012US63110