AN ELECTRON BEAM DEVICE, A GETTER SHEET AND A METHOD OF MANUFACTURING AN ELECTRON BEAM DEVICE PROVIDED WITH SAID GETTER SHEET
The present invention relates to an electron beam device having a body provided with an exit window, said body is forming or is at least partly forming a vacuum chamber, said vacuum chamber comprising therein a cathode housing (112) and at least one electron generating filament (120). At least one g...
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Main Authors | , , , , |
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Format | Patent |
Language | English French |
Published |
28.03.2013
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to an electron beam device having a body provided with an exit window, said body is forming or is at least partly forming a vacuum chamber, said vacuum chamber comprising therein a cathode housing (112) and at least one electron generating filament (120). At least one getter sheet (124) is provided between the cathode housing (112) and the filament (120). The invention is further comprising a getter sheet (124) for use in an electron beam device and a method of manufacturing an electron beam device comprising at least one getter sheet.
L'invention concerne un dispositif à faisceau d'électrons comprenant un corps doté d'une fenêtre de sortie, ce corps formant ou formant au moins partiellement une chambre à vide qui contient un boîtier de cathode (112) et au moins un filament (120) générant des électrons. Au moins une feuille de getter (124) est disposée entre le boîtier de cathode (112) et le filament (120). L'invention concerne en outre une feuille de getter (124) destinée à être utilisée dans un dispositif à faisceau d'électrons et un procédé de fabrication d'un dispositif à faisceau d'électrons comportant au moins une feuille de getter. |
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Bibliography: | Application Number: WO2012EP62456 |