HALOGEN-CONTAINING GAS SUPPLY APPARATUS AND HALOGEN-CONTAINING GAS SUPPLY METHOD
Provided is a halogen-containing gas supply apparatus, which supplies a halogen-containing gas to an external apparatus from a container filled with the halogen-containing gas with high pressure. The halogen-containing gas supply apparatus is provided with: a supply tube, which connects the containe...
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Main Authors | , , , |
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Format | Patent |
Language | English French Japanese |
Published |
12.04.2012
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Subjects | |
Online Access | Get full text |
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Summary: | Provided is a halogen-containing gas supply apparatus, which supplies a halogen-containing gas to an external apparatus from a container filled with the halogen-containing gas with high pressure. The halogen-containing gas supply apparatus is provided with: a supply tube, which connects the container and the external apparatus to each other; a supply valve, which is provided in the supply tube for the purpose of supplying the halogen-containing gas from the container; and a shock wave preventing mechanism, which is provided in the downstream of the supply valve, and which prevents shock waves from being generated.
La présente invention concerne un appareil d'alimentation en gaz halogéné qui fournit un gaz halogéné à un appareil externe depuis un récipient rempli du gaz halogéné à haute pression. L'appareil d'alimentation en gaz halogéné est pourvu : d'un tuyau d'alimentation qui raccorde le récipient et l'appareil externe l'un à l'autre ; d'une vanne d'alimentation qui est disposée dans le tuyau d'alimentation dans le but de fournir le gaz halogéné à partir du récipient ; et d'un mécanisme de protection contre les ondes de choc qui est disposé en aval de la vanne d'alimentation et qui empêche la génération d'ondes de choc. |
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Bibliography: | Application Number: WO2011JP70336 |