DEPOSITION CELL AND VACUUM DEPOSITION DEVICE PROVIDED WITH SAME

• Main Author: NIBOSHI, MANABU
• Format: Patent
• Language: English; French; Japanese
• Published: 08.03.2012
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

This deposition cell is provided with: a crucible (21) that houses a deposition material (M); an electrical heating wire (22) that, by means of heating the crucible (21), indirectly performs preliminary heating within a temperature range that does not vaporize the deposition material (M) housed in the crucible (21); and a lamp heater (24) that, by means of directly heating the deposition material (M) housed in the crucible (21), performs primary heating of the preliminarily heated deposition material (M) to at least the vaporization temperature. La présente invention concerne une cellule de dépôt équipée: d'un creuset (21) contenant un matériau de dépôt (M) ; un câble électrique chauffant (22) qui, en chauffant le creuset (21), effectue indirectement un chauffage préliminaire à l'intérieur d'une plage de températures qui n'évapore pas le matériau de dépôt (M) contenu dans le creuset (21) ; et un réchauffeur à lampe (24) qui, en chauffant directement le matériau de dépôt (M) contenu dans le creuset (21), effectue un chauffage du matériau de dépôt (M) qui a été soumis à un chauffage préliminaire jusqu'à au moins une température d'évaporation.