SEMICONDUCTOR AND SOLAR WAFERS

A silicon-on-insulator or bonded wafer includes an upper portion having a trapezoid shape in cross-section and a lower portion having an outer peripheral edge having a curved shape. L'invention porte sur une tranche à silicium sur isolant ou soudée, laquelle tranche comprend une partie supérieu...

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Bibliographic Details
Main Authors ZHANG, GUOQIANG, DAVID, VANDAMME, ROLAND
Format Patent
LanguageEnglish
French
Published 02.02.2012
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:A silicon-on-insulator or bonded wafer includes an upper portion having a trapezoid shape in cross-section and a lower portion having an outer peripheral edge having a curved shape. L'invention porte sur une tranche à silicium sur isolant ou soudée, laquelle tranche comprend une partie supérieure ayant une section transversale de forme trapézoïdale et une partie inférieure ayant un bord périphérique externe ayant une forme incurvée.
Bibliography:Application Number: WO2011IB53284