MICROMACHINED PIEZOELECTRIC THREE-AXIS GYROSCOPE AND STACKED LATERAL OVERLAP TRANSDUCER (SLOT) BASED THREE-AXIS ACCELEROMETER

• Main Authors: STEPHANOU, PHILIP, JASON, GANAPATHI, SRINIVASAN, KODAGANALLUR, BURNS, DAVID, WILLIAM, SHENOY, RAVINDRA, VAMAN, ACAR, CENK, BLACK, JUSTIN, PHELPS, PETERSEN, KURT, EDWARD
• Format: Patent
• Language: English; French
• Published: 03.11.2011
• Subjects: ELECTRICITY; GYROSCOPIC INSTRUMENTS; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such device...